| 摘要 |
PROBLEM TO BE SOLVED: To provide a carbon-made wafer-support which can be stably used for a long period of time without causing damage to semiconductor wafers. SOLUTION: The wafer supporting structure has 6 graphite net walls made of glass-like carbon material having properties of an average interplanar spacing d002 of 0.338 to 0.360nm, a single-crystal size Le(002) of 1.5 to 4.0nm, a surface Vickers hardness of 240 or less, and a surface roughness Ra of 0.05μm or less. The structure is made of preferably glass-like carbon material which has, in addition to the above properties, properties of a maximum diameter of pores of 5μm or less exposed to the surface, a pore density of one pore or less/mm<2> and a bending strength of 800kg/cm<2> . |
