| 摘要 |
PROBLEM TO BE SOLVED: To obtain a light-receiving apparatus by which the quantity of emitted light and the emission spectrum of a semiconductor wafer are measured simultaneously by a method wherein the optical-fiber input part of an optical spectrum analyzer is installed vertically in the center of a light-receiving face at a photoelectric conversion device so as to receive light. SOLUTION: A semiconductor wafer 10 for a light-emitting device is placed on a wafer stage 1. A light-receiving part 3 is formed on the wafer 10, a power- supply device 5 is connected to the stage 1 and a probe 4, a current is supplied from the power-supply device, and the light-emitting part 3 emits light. The light from the light-emitting part 3 on the wafer 10 is received by an optical- fiber input part 12 at a photoelectric conversion device 11 installed at the upper part. The input part 12 is formed vertically in the center of the conversion device 11, and it is connected to a spectrum analyzer 9. In addition, the device 11 is connected to a quantity-of-light measuring device 8. Thereby, the spectrum of light emitted from the light-emitting part 3 on the semiconductor wafer 10 and the quantity of light in all directions are measured simultaneously. The interval between a light-receiving face at the input part 12 and the light-emitting face 3 on the wafer 10 can be brought close to 5mm. |
