发明名称 |
A process for distributing ultra high purity gases with minimized contamination and particules |
摘要 |
A process for distributing ultra high purity gases with minimized contamination and particulates including; (a) purging said distribution network or any part thereof with dry inert high purity gas comprising less than 1 ppm of any impurity; (b) evacuating said distribution network or any part thereof at a pressure which is lower than 5 x 10<4> Pascal; (b') optionally wet cleaning a gas distribution network or any part thereof with a wet cleaning agent, thereafter (c) liquid drying the gas distribution network or any part thereof with an H2O desorbing liquid drying agent selected from the group comprising acetone dimethylacetal DMP, 2-2 dichloropropane DCP or 2-2 dibromopropane DBP, mixtures thereof and any equivalent thereof, and (d) distributing an ultra high purity gas through the distribution network or any part thereof. |
申请公布号 |
EP0719979(A3) |
申请公布日期 |
1997.05.02 |
申请号 |
EP19950402915 |
申请日期 |
1995.12.22 |
申请人 |
L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE |
发明人 |
TSUKAMOTO, TOSHIYUKI;FANJAT, NORBERT;FRIEDT, JEAN-MARIE |
分类号 |
F17D1/04;B01J4/00;B08B9/00;B08B9/02;F17C9/00 |
主分类号 |
F17D1/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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