APPARATUS FOR INSPECTING FOREIGN MATTER AND METHOD FOR INSPECTING/DISPLAYING FOREIGN MATTER,申请号JP19950294855-传众专利搜索

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发明名称	APPARATUS FOR INSPECTING FOREIGN MATTER AND METHOD FOR INSPECTING/DISPLAYING FOREIGN MATTER
摘要
申请公布号	JPH09113458(A)	申请公布日期	1997.05.02
申请号	JP19950294855	申请日期	1995.10.18
申请人	NIKON CORP	发明人	MORIYA HAJIME
分类号	G01B11/30;G01N21/88;G01N21/94;G01N21/956;H01L21/66;(IPC1-7):G01N21/88	主分类号	G01B11/30
代理机构		代理人
主权项
地址

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