| 摘要 |
<p>A developing liquid circulation controlling system includes a circulating pump 61-67 for providing circulation of processing liquid from an upper region of a processing tank 41-47, an auxiliary tank 41a-47a, a circulating passage 51-57, a lower region of the processing tank and then back to the upper region of the processing tank. The circulating pump provides at least two selectable differing circulation amounts. For providing this, the system includes a use condition detecting sensor 10 for detecting at least two different use conditions of the processing tank, and a controller 100, 101 operatively connected with the sensor. The controller sets the circulating pump to a high circulation amount mode when the sensor detects a first use condition and sets the pump to a low circulation amount mode when the sensor detects a second use condition. <IMAGE></p> |
