| 摘要 |
PURPOSE:To form an oxidizing film on a substance to be processed with high yield, to enable automation of a device, and to enable the reduction in the size of a device, by providing a means to burn and chemically combine first and second gases in a combustion chamber to generate steam and a means to mix together two kinds of gases after the one gas is heated. CONSTITUTION:The load direction of a quartz boat 14 conveyed in a process tube 11 coincides with the own weight direction of the quartz boat 14, and the quartz boat 14 is prevented from making contact with the inner surface of the process tube 11 due to the bending and sagging of a fork. An external combustion device 10 feeds oxygen gas to an introduction pipe 20 and hydrogen gas to an introduction pipe 30 in a specified feed amount ratio. In which case, for example, hydrogen gas is heated to a temperature exceeding an ignition point, and the heating imparts energy, required for combustion, to oxygen gas and hydrogen gas. At a moment when hydrogen gas is discharged through a nozzle 33 to a combustion chamber 50, it makes contact with oxygen gas for ignition, and combustion combination is started to generate steam. The steam is cooled by cooling systems 55 and 56 and is fed to the process tube 11. |
