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发明名称
SEMICONDUCTOR DEVICE AND ITS MANUFACTURE THEREOF
摘要
申请公布号
JPH09116007(A)
申请公布日期
1997.05.02
申请号
JP19950272495
申请日期
1995.10.20
申请人
FUJITSU LTD
发明人
HAYASHI HIROMI
分类号
H01L21/28;H01L21/3205;H01L21/3213;H01L21/768;H01L23/52;H01L23/522;(IPC1-7):H01L21/768;H01L21/320;H01L21/321
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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