INSPECTING METHOD FOR SEMICONDUCTOR DEVICE,申请号JP19960121211-传众专利搜索

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发明名称	INSPECTING METHOD FOR SEMICONDUCTOR DEVICE
摘要
申请公布号	JPH09115971(A)	申请公布日期	1997.05.02
申请号	JP19960121211	申请日期	1996.05.16
申请人	MATSUSHITA ELECTRIC IND CO LTD;TOKYO ELECTRON LTD	发明人	NAKADA YOSHIRO;OKI SHINICHI;NAGAO KOICHI;HATADA KENZO;MORI SHIGEOKI;SATO TAKASHI;SANO KUNIO
分类号	G01R31/26;G01R1/06;G01R1/073;H01L21/66;(IPC1-7):H01L21/66	主分类号	G01R31/26
代理机构		代理人
主权项
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