DEVICE AND METHOD FOR INTRODUCING IMPURITY,申请号JP19960171191-传众专利搜索

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发明名称	DEVICE AND METHOD FOR INTRODUCING IMPURITY
摘要
申请公布号	JPH09115852(A)	申请公布日期	1997.05.02
申请号	JP19960171191	申请日期	1996.07.01
申请人	MATSUSHITA ELECTRIC IND CO LTD	发明人	NAKAOKA HIROAKI;MIZUNO BUNJI;TAKASE MICHIHIKO;NAKAYAMA ICHIRO
分类号	H01L21/22;H01L21/265;(IPC1-7):H01L21/265	主分类号	H01L21/22
代理机构		代理人
主权项
地址

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