发明名称 |
Photosensitive resin composition and method for forming pattern using the same |
摘要 |
Disclosed is a photosensitive resin composition, comprising: (a) a polysilane having a weight-average molecular weight of not less than 10000, which is soluble in an organic solvent; (b) a combination of a photoradical generator and an oxidizing agent; (c) a silicone oil; and (d) an organic solvent, and a method for forming a pattern using the same. Since photoreactivity was extremely improved in comparison with a conventional polysilane composition, an exposure time was shorten. Therefore, it is possible to increase a productivity of a color filter. |
申请公布号 |
EP0725315(A3) |
申请公布日期 |
1997.05.02 |
申请号 |
EP19960300399 |
申请日期 |
1996.01.22 |
申请人 |
NIPPON PAINT CO., LTD. |
发明人 |
TSUSHIMA, HIROSHI;MIKAMI, SHIGERU;WATANABE, EMI;IMAMURA, TSUYOSHI;SUMIYOSHI, IWAO |
分类号 |
G03F7/075 |
主分类号 |
G03F7/075 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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