摘要 |
PROBLEM TO BE SOLVED: To improve yield while lengthening the lifetime of a diode by enhancing the output coupling of radiation generated in the diode. SOLUTION: This diode is arranged onto a semiconductor substrate 1 and consists of the semiconductor substrate 1 with epitaxial layer series 2, 3 fitted to optical radiation, and contact-layer structure 5, 6, 7 is disposed onto the surface 4 of the layer series at least partially. The surface 4 of the epitaxial layer series 2, 3 is delustered completely for improving optical yield at that time, and the contact-layer structure 5, 6, 7 is arranged on the delustered surface 4. |