METAL CANTILEVER, INTERATOMIC FORCE MICROSCOPE AND SCANNING ELECTROSTATIC CAPACITY MICROSCOPE COMPOSITE DEVICE, AND INTERATOMIC FORCE MICROSCOPE, SCANNING ELECTROSTATIC MICROSCOPE AND SCANNING TUNNEL MICROSCOPE COMPOSITE DEVICE
摘要
申请公布号
JPH09113521(A)
申请公布日期
1997.05.02
申请号
JP19950297567
申请日期
1995.10.19
申请人
NISSIN ELECTRIC CO LTD
发明人
YAO TAKAFUMI;TOMIYA HIDETO;YOSHIMURA MASAMITSU;KAWAMI HIROSHI
