| 摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray generator which enables achievement of satisfactory image coupling performance, and a high-performance aligner and the like using the same. SOLUTION: In an X-ray generator using a laser plasma light source 9, a plurality of light-emitting points 1 are arrayed so that an object is illuminated by Koehler illumination with X-rays emitted from the light-emitting points. In order to produce a plurality of light-emitting points, a plurality of positions on a target 11 are irradiated with a plurality of laser beams, or a plurality of positions on the target are irradiated in time series with a deflected laser beam from one laser light source. |
