| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and an apparatus for inspecting defect in which a bubble in the viscous layer of a reflective polarization object can be detected quickly and accurately. SOLUTION: A light emitted from a light emitting unit 212 passes through a polarizer having a plane of polarization intersecting that of the polarization film in a reflective polarization object 1 substantially perpendicularly to produce a linearly polarized light which is then projected toward the reflective polarization object 1. When a reflected light is received by a video camera 24 a candidate of bubble in reflective polarization object 1, where the light reflected on the polarization film in the direction opposite to the incoming direction of irradiating light is removed, is detected. Subsequently, the polarizer 22 is removed and the magnification of an optical microscope 23 is set approximately two times as high as that when a defect is inspected by fixing the polarizer 22. The stage plane 251 is then shifted vertically so that the focal point of the optical microscope 23 is set in the viscous layer and the candidate part of bubble is focused and inspected thus detecting a bubble in the viscous layer on the glass substrate side. |
