| 摘要 |
PROBLEM TO BE SOLVED: To measure two-dimensional position and attitude with specified accuracy, by using at least two one-dimensional sensors. SOLUTION: A mark 3 having two straight lines L1 and L2 which is not parallel to each other is provided on an object surface 2 of a test object 1, and the mark 3 is imaged on at least two one-dimensional photosensors 6a and 6b. When the one-dimensional photosensors 6a and 6b output the sensor signals having light intensity distribution in the longitudinal direction, a calculation unit 9 calculates the positions of straight lines L'1 and L'2 of a mark image 3' from the sensor signals. From the calculation result, the position of an intersection P of the two straight lines L1 and L2 and the inclination of one of the two straight lines L1 and L2 are calculated. For example, the calculation results are made a reference point for position measurement and a reference line for attitude measurement, in the test object 1. |
