OXIMESULFONIC ACID ESTERS AND THE USE THEREOF AS LATENT SULFONIC ACIDS

摘要

The invention relates to the use of oximesulfonic acid esters of formula I (I), wherein m is 0 or 1 and x is 1 or 2; R1 is, for example, substituted phenyl, R2 has, for example, one of the meanings of R1 or is unsubstituted phenyl, C1-C6alkanoyl, unsubstituted o r substituted benzoyl, C2-C6alkoxycarbonyl or phenoxycarbonyl; or R1 and R2, if ne cessary together with the CO group, form a ring, R3, when x is 1, is, for example, C1-C1 8alkyl, phenyl or phenanthryl, the radicals phenyl and phenanthryl being unsubstituted or subst ituted, or R3, when x is 2, is, for example, C2-C12alkylene, phenylene or oxydiphenylene, t he radicals phenylene and oxydiphenylene being unsubstituted or substituted, as latent acid donors, especially at wavelengths over 390 nm, and to the use of the compounds in the pr oduction of photoresists.