PARYLENE POLYMER LAYERS

摘要

Multi-level structures including a first layer with a parylene polymer layer deposited thereon. The parylene polymer layer has structure (I), wherein m is an integer having a value of 0, 1, 2, 3 or 4, and z is greater than 1. G is a halogen, an alkyl group, a cyclo hydrocarbon, an alkylene group or an alkylyne group having the general formula CnHyXw. X is a halogen, and n is an integer greater than zero. The sum of y and w is at most equal to a 2n+1. The parylene polymer layer has a zinc impurity level of at most about 10 parts per million. In certain embodiments, the parylene polymer layer may have a zinc impurity level of less than 50 parts per billion. The parylene polymer layers are formed by a process in which monomers are formed outside of a deposition zone of a vacuum chamber. The monomers may be prepared by a process in which a parylene dimer is vaporized and subsequently pyrolized. The process may further include the step of passing the vapor through a post-pyrolysis zone prior to depositing the monomer on the substrate.