Sonde mit freitragendem Arm, Rastertunnelstrommikroskop und Informationsverarbeitungsapparat unter Anwendung davon

摘要

A cantilever type probe is shown having a piezoelectric bimorph cantilever containing a piezolelectric material (5) provided between driving electrodes (2, 4) for driving a cantilever. A probe is formed on the cantilever and a drawing electrode (6) for the probe is provided along the surface where the probe is formed. A shielding electrode (11) for electrically isolating the probe and the drawing electrode from the driving electrodes is also provided. <IMAGE>