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发明名称
摘要
申请公布号	JP2534180(Y2)	申请公布日期	1997.04.30
申请号	JP19910016043U	申请日期	1991.02.26
申请人		发明人
分类号	B65G1/04;B65G1/00;B65G25/08;B65G59/06;H01L21/677;H01L21/68;(IPC1-7):B65G1/00	主分类号	B65G1/04
代理机构		代理人
主权项
地址

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