| 摘要 |
A megasonic cleaning system utilizes a transducer positioned outside of a cleaning tank to transmit acoustical energy into the cleaning tank. A liquid layer is used to couple the acoustical energy from the transducer to the cleaning tank. An acoustical impedance matching layer, having an acoustical impedance in between that of the transducer and the cleaning fluid, is used to match the impedance of the transducer to that of the cleaning fluid. In one embodiment, the system utilizes at least two transducer arrays and power is switched back and forth between the two arrays. When one array is not being powered, it can be used to listen to the other array.
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