| 摘要 |
A method of fabricating an optical path controller of a projection-type image display includes the steps of selectively forming a ceramic layer 21 on a driving substrate 20 and forming a sacrificial oxide layer 22 on a predetermined portion of the driving substrate 20, other than the ceramic layer region 21, forming a ceramic layer 23 on the overall surface of the driving substrate, selectively removing a predetermined portion of the ceramic layers 21 and 23 to torm a trench, filling a metal 24 in the trench and forming a signal electrode 25 on the surface of the ceramic layer 23 including the metal region 24, selectively forming a ceramic layer 26 on the ceramic layer 23 including the signal electrode region 25 and forming a bias electrode 27 on an exposed surface of the substrate, selectively removing an unnecessary portion of the bias electrode 27 and ceramic layer 26 to pattern the them by a plurality of pixels, selectively forming a ceramic layer 28 on each bias electrode 27, forming a sacrificial oxide layer 29 on an exposed surface other than the ceramic layer region 28 and forming a ceramic layer 30 on the overall surface of the substrate, patterning the ceramic layer 30 and driving substrate 20 by pixels, removing the sacrificial oxide layers 22 and 29 and forming a mirror 31.
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