| 摘要 |
An inner peripheral portion of a metallic diaphragm (11) having a mounting hole (11a) at a central portion is held between a metallic welding fitting (8, 8') and a metallic holding member (6, 17), each respectively having an annular flat portion (8a, 6a, 17a) to contact an inner peripheral portion. The inner peripheral portion of the metallic diaphragm and the portions of the metallic welding fitting and the metallic holding member contacting the inner peripheral portion of the foregoing metallic diaphragm are welded at W', W'' along entire peripheries thereof in order to secure these three components together as one body.
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