Super-resolution scanning optical system by incoherently superimposing two beams

摘要

A linearly polarized light beam emitted from a first coherent light source is focused, as a primary beam, onto a preparation via an objective lens. A subsidiary beam emitted from a second coherent light source is a linearly polarized light beam having a plane of polarization perpendicular to that of the primary beam. The subsidiary beam is focused onto the above preparation as a double-humped beam having a center in the same position as that of the primary beam. The principal portion of the subsidiary beam is equal in size to that of the primary beam. The preparation is scanned with the two beams being superimposed on each other. After transmitted by the preparation, the two beams are separated into the primary beam and the subsidiary beam again upon passing through a second polarizing beam splitter so that they are detected individually by first and second optical detectors. Output signals from the first and second optical detectors are calculated by a differential calculator and displayed on a display unit via a second control means.