Electrophotographic photosensitive member provided with a light receiving layer composed of a non-single crystal silicon material containing columnar structure regions and process for the production thereof

摘要

PCT No. PCT/JP93/00824 Sec. 371 Date Feb. 18, 1994 Sec. 102(e) Date Feb. 18, 1994 PCT Filed Jun. 18, 1993 PCT Pub. No. WO93/25940 PCT Pub. Date Dec. 23, 1993An electrophotographic photosensitive member comprising a substrate and a light receiving layer composed of a silicon-containing non-single crystal material disposed on said substrate, characterized in that said light receiving layer contains a plurality of columnar structure regions each grown from a nucleus situated in said light receiving layer wherein said plurality of columnar structure regions are arranged substantially in parallel to the thicknesswise direction of said light receiving layer and at a density in the range of 5/cm2 to 500/cm2.