发明名称 SRAM cell with balanced load resistors
摘要 SRAM cells are manufactured with balanced, high-resistance load resistances by having substantially all of dielectric layer directly over the polysilicon load resistor covered by a metal layer. The metal layer protects the polysilicon during subsequent processing which can adversely alter its characteristics.
申请公布号 US5625215(A) 申请公布日期 1997.04.29
申请号 US19950413014 申请日期 1995.03.28
申请人 LUCENT TECHNOLOGIES INC. 发明人 CHEN, MIN-LIANG;JUENGLING, WERNER
分类号 H01L27/04;H01L21/822;H01L21/8244;H01L27/11;(IPC1-7):H01L27/11 主分类号 H01L27/04
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