| 摘要 |
A method of fabricating an optical path controller of a projection-type image display device includes the steps of selectively forming a sacrificial layer 21 on a driving substrate 20 and forming a signal electrode 22 on an exposed surface of the substrate, forming a ceramic layer 23 on the overall exposed surface of the substrate and selectively forming a bias electrode 24 thereon, forming a support 25 on the ceramic layer 23 and forming a sacrificial layer 26 on the bias electrode 24, forming a body 27 on the overall surface of the substrate, patterning the body 27, sacrificial layer 26, support 25, bias electrode 24, ceramic layer 23, signal electrode 22 and sacrificial layer 21 by pixels and removing the sacrificial layers 21 and 26, and forming a mirror on the body 27.
|
