发明名称 |
Method of making a mask ROM with a groove |
摘要 |
The mask ROM of the present invention is manufactured in the following processes; forming a cell array in which all the cells will be driven as on-cells, forming a groove by etching some portions of the semiconductor substrate in the drain region of the specific on-cell among the on-cells on customer's request, and then practicing a source and drain ion implantation process.
|
申请公布号 |
US5624862(A) |
申请公布日期 |
1997.04.29 |
申请号 |
US19960614802 |
申请日期 |
1996.03.07 |
申请人 |
HYUNDAI ELECTRONICS INDUSTRIES CO. LTD. |
发明人 |
AN, JAE C. |
分类号 |
H01L21/768;H01L21/8246;H01L27/10;(IPC1-7):H01L21/824 |
主分类号 |
H01L21/768 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|