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发明名称
INDUCTION PLASMA SOURCE
摘要
申请公布号
KR970006209(B1)
申请公布日期
1997.04.24
申请号
KR19930023063
申请日期
1993.11.02
申请人
NOVELLUS SYSTEMS INC.
发明人
BENZING, JEFFREY C.;BROADBENT, ELIOT K.;ROUGH J. KIRKWOOD H.
分类号
C23F4/00;H01J37/32;H01L21/205;H01L21/302;H01L21/3065;H05H1/46;(IPC1-7):H01L21/302
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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