申请人 |
SHIN-ETSU CHEMICAL CO., LTD., TOKIO/TOKYO, JP |
发明人 |
ISHIII, MASATOSHI, FUKUI-SHI, FUKUI-KEN, JP;SAKAI, SHIGERU, TAKEFU-SHI, FUKUI-KEN, JP;FUJIMA, YOSHIHIKO, FUKUI-SHI, FUKUI-KEN, JP;YOSHIDA, AKIHIKO, TAKEFU-SHI, FUKUI-KEN, JP;YOSHIDA, NORIFUMI, FUKUI-SHI, FUKUI-KEN, JP |