Kapazitiver Messaufnehmer für Beschleunigungen in allen Richtungen in einer Ebene

摘要

Capacitive acceleration sensor composed of two electrodes (4 and 5) arranged on a support (1) and a moving mass (3) connected to the support by a rigid frame (2) and by flanges (6 and 7). The layout of the flanges is chosen so that the acceleration in the plane of the flanges produces a uniform displacement of the upper electrode (5) whatever the direction of the acceleration.