发明名称 |
NOVOLAC POLYMER PLANARIZATION FILMS FOR MICROELECTRONIC STRUCTURES |
摘要 |
<p>An improved method for forming planarization films which remain adhered to substrates upon exposure to heat comprising first applying a polymeric solution containing a low molecular weight novolac resin, a surfactant selected from the group consisting of a non-fluorinated hydrocarbon, a fluorinated hydrocarbon and combinations thereof, and an optional organic solvent to a substrate, followed by heating the substrate.</p> |
申请公布号 |
EP0769204(A2) |
申请公布日期 |
1997.04.23 |
申请号 |
EP19950926623 |
申请日期 |
1995.07.05 |
申请人 |
ALLIEDSIGNAL INC.;ALLIEDSIGNAL INC. |
发明人 |
DRAGE, JAMES, STEVEN;DRAGE, JAMES, STEVEN |
分类号 |
C08G8/10;C08G8/00;C08L61/06;C09D161/04;C09D161/06;H01L21/312;(IPC1-7):H01L21/00 |
主分类号 |
C08G8/10 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|