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发明名称
Pressurized sealable transportable containers for storing a semiconductor wafer in a protective gaseous environment
摘要
申请公布号
EP0582016(B1)
申请公布日期
1997.04.23
申请号
EP19920480109
申请日期
1992.08.04
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
GARRIC, GEORGES;LAFOND, ANDRE
分类号
B65G49/07;G03F7/20;H01L21/673;H01L21/677;H05K5/06;(IPC1-7):H01L21/00
主分类号
B65G49/07
代理机构
代理人
主权项
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