发明名称 Barrier alignment and process monitor for TIJ printheads
摘要 <p>A thermal ink jet printhead formed of a silicon substrate (11), a thin film resistor layer (13) disposed on the silicon substrate, a patterned metallization layer (15) disposed on the thin film resistor layer for defining a plurality of ink firing resistors (16) in the resistor layer, and a barrier layer (19) overlying the resistor layer and the metallization layer and having firing chamber openings (21) formed therein. The metallization layer further includes a reference target pattern (51), and the barrier layer further includes a reference opening (53) overlying the target reference pattern which is configured such that the alignment of reference opening relative to the target reference is representative of the alignment of the respective firing chamber openings relative to the associated underlying ink firing resistors. <IMAGE></p>
申请公布号 EP0616892(B1) 申请公布日期 1997.04.23
申请号 EP19930117895 申请日期 1993.11.04
申请人 HEWLETT-PACKARD COMPANY 发明人 HOCK, SCOTT W.
分类号 B41J2/05;B41J2/14;B41J2/15;B41J2/16;(IPC1-7):B41J2/14 主分类号 B41J2/05
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