| 摘要 |
PURPOSE:To form multilayered diamond film with physical properties suitable for a variety of applications by changing the conditions for making diamond thin films through the vapor-phase process to laminate a plurality of thin films different in physical properties along the film-growing direction. CONSTITUTION:The conditions for synthesizing diamond thin films through the vapor-phase process care varied continuously or discontinuously to laminate a plurality of diamond thin films with different physical properties along the film growth direction on the base. For example, the first layer formed on the base is fine crystal diamond and the second layer formed thereon includes (110) crystal parallel to the base plate. |
