| 摘要 |
PROBLEM TO BE SOLVED: To precisely inspect a transparent layer surface of an inspection object. SOLUTION: The surface inspection device, by which a surface 1 of an inspection object consisting of a transparent layer formed on a flat plate provided with a light scattering property is inspected by using light, is constructed of a light projection optical system 2 projecting parallel light onto the surface 1 of the inspection object, a light receiving face 3 which is arranged in the optical axis direction of reflected light from the surface 1 of the inspection object, to which light is projected, so as to receive the reflected light from the surface 1, and a reflected image formation optical system 4 by which the surface 1 of the inspection object and the light receiving face 3 are related to each other in an image forming position relationship and the reflected light parallelly reflected from the surface 1 enters the light receiving face 3 parallelly. |
