METHOD AND APPARATUS FOR SEPARATION AND RECOVERY OF PERFLUORO COMPOUND GAS

摘要

PROBLEM TO BE SOLVED: To recover at least one kind of perfluoro compd. gas from a gas mixture. SOLUTION: A gas mixture of predetermined pressure containing at least one kind of perfluoro compd. gas and at least one kind of carrier gas is provided and a glass like polyer film having a supply side and a permeated matter side is provided. The supply side of the film is brought into contact with the gas mixture and conc. gas substantially containing at least one kind of the perfluoro compd. gas is taken out from the supply side of the film as a non- permeated matter stream of which the pressure is substantially equal to predetermined pressure and a lean gas mixture substantially composed of at least one kind of carrier gas is taken out from the permeated matter gas side of the film as a permeated matter stream.