| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide vacuum tweezers capable of preventing generation of particles. SOLUTION: When a contact part 1a comes into contact with a wafer (not shown) to operate an operation part 3 in a direction of arrow A via a cover part 4, as an air is started absorbing from an intake 1b and pressure in a region formed by a wafer, the contact part 1a and the intake 1b is reduced, the wafer is sucked to the contact part 1a. In this case, particles which may generate by operating the operation part 3 can be prevented by the cover part 4.</p> |
