| 摘要 |
PROBLEM TO BE SOLVED: To clearly grasp the setting contents of a defect by indicating image information about dimension and shape corresponding to inputted numerical values for the defect as visual patterns. SOLUTION: Numerical value data of an inspection setting value set by means of a setting device part 22 is fed to an image forming circuit 23. In the circuit 23, image information about dimension and shape of a defect, which the numerical values concerning the maximum limit size in the final setting mean, is formed, and at the same time, defect color image information about the grade of a gray gradation corresponding to voltage level for each finally set threshold value is formed, and then, these pieces of image information are composited together. The composited image information and the numerical value data are transferred to a display 24 so as to be displayed as a defect image in color. That is, on the display 24, not only the numerical values inputted by means of a keyboard 21 are displayed as images, but also the shape, the dimension, and the color tone of the defect specified by these numerical values are displayed as color visual patterns on the screen. |
