| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for adjusting beam irradiation points wherein irradiation points with a plurality of beams can be made to coincide with each other in a short period of time on the surface of a sample crossing the center axis of an analysis tube. SOLUTION: A sample 4 for use in adjustment coated with a fluorescent paint 3 is placed on a sample table 5 in order to conduct surface analysis. Laser beam 11 is oscillated from a light source 10 installed on the side surface of an analysis tube 9, and the laser beam 11 is reflected toward the sample 4 by a reflection mirror 12 provided in a place on the central axis in the analysis tube 9. Irradiation points with an electron beam, an ion beam, and X rays, are made to coincide with each other on the surface of the sample 4 which is irradiated with the laser light. |
