| 摘要 |
PROBLEM TO BE SOLVED: To shorten the evacuation time by permitting one of the continuously provided vacuum chambers to be exclusively used for an interlayer protective sheet, providing an evacuating means and a heating means in the vacuum chamber and efficiently removing the water and gas adsorbed by the interlayer protection sheet. SOLUTION: A strip-shaped substrate 10 is transferred to a film forming vacuum chamber 201 from a bobbin 11 by a roller 13. The strip-shaped substrate 10 is heated to the film forming temperature by a lamp heater 203, film forming process is performed in film forming chambers 204 and 206 by targets 205 and 207, and the film is taken up by a take-up bobbin 12. At that time, the interlayer protective sheet 15 for protecting the surface of the strip-shaped substrate 10 is delivered from a delivery core 16 in the vacuum chamber 1 and is taken up at the same time. In the vacuum chamber 1, a heating means 3 which discharges water and gas from the interlayer protective sheet 15 is provided, and the air is drawn from an exhaust port 2 by a vacuum pump. Purging gas is fed from gas gates 411 and 511 through purging gas supply tubes 412, 413, 512 and 513. Thus, water and gas are efficiently removed and the evacuation time is shortened. |
