| 摘要 |
PROBLEM TO BE SOLVED: To ensure the good signal transfer to a disk and to enhance productivity by providing first and second temp. adjusting means regulating the temps. of the first and second members to the first and second holding members holding the first and second members of first and second mold semiconductors through first and second holding members. SOLUTION: Water passages 22A, 24A for adjusting the temps. of a fixed template 22 and a movable template 24 are provided in the fixed template 22 and a movable template 24 and water having predetermined temp. is supplied to the water passages 22A, 24A to be circulated to the fixed template 22 and the movable template 24. By this constitution, the signal surface 8A of the stamper 8 forming the cavity 14 and the temp. of the inner peripheral surface 12A and the temp. of the inner peripheral surface 13A of an outer peripheral ring 13 can be made almost uniform. Therefore, even if the temp. of the water supplied to the respective water channels of the fixed mirror 4 and the movable mirror 12 is set low in order to shorten a disk molding time, a uniform and good signal can be transferred to the disk even if the temp. of the water supplied to the respective water passages of the fixed mirror 4 and the movable mirror 12 is set low and a uniform and good signal can be transferred to the disk and the productivity of the disk can be enhanced while the good signal transfer to the disk is ensured. |
