| 摘要 |
PROBLEM TO BE SOLVED: To realize an automatic processing device which is capable of efficiently carrying out a stepper exposure process and lessened in floor space. SOLUTION: A cassette arrangement section 5 is arranged confronting the wafer loading/unloading opening 2a of a stepper exposure system 2, a processing section 6 is arranged between the cassette arrangement section 5 and the wafer loading/unloading opening 2a of the stepper exposure system 2 so as to make its lengthwise direction nearly vertical to the direction in which the cassette arrangement section 5 and the stepper exposure system 2 are arranged opposed to each other. An indexer robot 7 and a transfer robot 8 buffers 10 and 11 where wafers can he placed for each transfer direction are provided between an indexer robot 7 and a transfer robot 8 and between the indexer robot 7 and a turning robot 9. |
