SUBSTRATE ROTARY HOLDER AND ROTARY SUBSTRATE TREATER

摘要

PROBLEM TO BE SOLVED: To provide a substrate rotary holder capable of holding a substrate in a horizontal direction always by a strong holding force, and a rotary substrate treater using it. SOLUTION: A rotary holding member 5 comprises a columnar support part 6 and a columnar holding part 7 having a smaller diameter than the support part 6. The support 6 is fitted on to a rotary member 1 which can be pivoted around a rotary shaft of the coaxial shaft with the center shaft. The holding part 7 is provided eccentrically with respect to the rotary shaft in an upper face part of the support part 6. An outer peripheral face of the holding part 7 is abutted against an outer peripheral end edge of the substrate 100 with rotation of the support part 6, and the substrate 100 is held in a horizontal direction.