| 摘要 |
<p>PROBLEM TO BE SOLVED: To suppress the reduction of an obtained thin film thickness and provide an electron emission element having little dispersion of element characteristics by keeping a manufacturing atmosphere in a reduced pressure state or a cooled state as a manufacturing of an electron emission film. SOLUTION: After washing an insulating substrate 5, element electrode material is deposited by a vacuum deposition method, or the like, and thereafter, element electrodes 9, 10 are formed on the surface of the substrate 5. A thin film for forming an electron emission portion 6 are formed between the electrodes 8, 9 provided on the substrate 5. As a forming method, an organic metal compound or an inorganic metal compound is used as raw material, and manufacturing is conducted by a bubble jet method. Either or both of a pressure reduction method or a cooling method of the atmosphere of the bubble jet method. Like this, the thin film is formed, and thereafter heat-treated. By the heat treatment, the thin film is changed into a metal particulate film or a metal oxide particulate film, and is subjected to patterning by lift-off, etching, or the like so as to form the thin film 6.</p> |
