发明名称 |
Interferometric near-field apparatus based on multi-pole sensing |
摘要 |
An apparatus suitable for providing near-field measurements of a workpiece. The apparatus comprises a source of electromagnetic radiation for generating an incident wave; means for directing at least a portion of the incident wave to the workpiece; a probe tip acting as an antenna and capable of re-radiating a signal wave, said signal wave developing as an interactive coupling between said workpiece and said probe tip; means for creating an interference signal based on the signal wave and a reference wave; and a detector for interrogating at least one of the phase and amplitude of the interference signal.
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申请公布号 |
US5623338(A) |
申请公布日期 |
1997.04.22 |
申请号 |
US19950511169 |
申请日期 |
1995.08.04 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
WICKRAMASINGHE, HEMANTHA K.;ZENHAUSERN, FREDERIC;MARTIN, YVES;O'BOYLE, MARTIN P. |
分类号 |
G01N37/00;G01Q30/00;G01Q60/18;(IPC1-7):G01B9/02 |
主分类号 |
G01N37/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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