摘要 |
PROBLEM TO BE SOLVED: To prepare a hard coating film more excellent in wear resistance than a conventional (Ti, Al) (N, C) coating film by specifying the compsn. of multiple nitride, etc., of Ti, Al and M (M is Hf or Zr). SOLUTION: In this hard coating film of multiple nitride, carbide, boride, carbonitride, boronitride, borocarbide or borocarbonitride of Ti, Al and M, the compsn. of Ti-M-Al is represented by the formula Ti1-(x+y) Mx Aly (where 0<x<=0.8, 0<y<=0.8 and x+y<1). This hard coating film and a hard coating film of multiple nitride, carbide, boride, carbonitride, boronitride, borocarbide or borocarbonitride of Ti and Al having a compsn. represented by the formula Ti1-z Alz (where 0<z<=0.8) may be laminated in two or more layers in total. The thickness of the hard coating films is preferably regulated to 0.1-20μm.
|