| 摘要 |
PROBLEM TO BE SOLVED: To stabilize the output of a laser beam with an inexpensive facility by providing a control means for detecting the composition change of the laser gas based on the output of a light detection means. SOLUTION: The amount of O2 contained in the laser gas changes with time after a laser beam starts, thus also causing the output of the laser beam to change. A pin photodiode 10b for forming a photodetector 10 detects the level of the spectrum line (a) whose level fluctuates due to the change in the amount of O2 and outputs the level to an amplifier 11a as a detection signal. After that, the detection signal is inputted to a comparison operation part 11b and a control signal is outputted to drives 11c and 11c. In this manner, the output of laser beam can be stabilized by controlling the amount of opening of a supply flow adjusting equipment 6b and an exhaust flow adjusting equipment 7b based on the level of the spectrum line (a) whose level fluctuates due to the change in the amount of oxygen O2 . |
