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发明名称
ETCHER OF SEMICONDUCTOR WAFER
摘要
申请公布号
KR970003601(Y1)
申请公布日期
1997.04.18
申请号
KR19940004886U
申请日期
1994.03.11
申请人
HYUNDAI ELECTRONICS IND.CO.,LTD.
发明人
HWANG, JOON;PARK, SANG-HOON
分类号
H01L21/302;(IPC1-7):H01L21/302
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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