Transportvorrichtung für ein Transferelement in einer Speichereinrichtung für die Herstellung von Halbleitervorrichtungen

摘要

A transfer transporting apparatus for a semiconductor device manufacturing stocker 1 includes A driving means for carrying a transfer 11 in the horizontal direction, a base 12 on which the said driving means is installed; and A driving means for carrying the base 12 in the vertical direction to thereby accurately position the transfer 11 carrying cassettes for the semiconductor devices, within the stocker 1.