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发明名称
Verfahren zum Herstellen einer integrierten Schaltung
摘要
申请公布号
DE69218035(D1)
申请公布日期
1997.04.17
申请号
DE19926018035
申请日期
1992.05.08
申请人
AT&T CORP., NEW YORK, N.Y., US
发明人
ADAMS, THOMAS EVANS, EMMAUS, PENNSYLVANIA 18049, US;LEE, KUO-HUA, WESCOSVILLE, PENNSYLVANIA 18106, US;NAGY, WILLIAM JOHN, BETHLEHEM, PENNSYLVANIA 18017, US;SUNG, JANMYE, ALLENTOWN, PENNSYLVANIA 18103, US
分类号
H01L21/8244;H01L27/11;(IPC1-7):G03F7/20;H01L21/82
主分类号
H01L21/8244
代理机构
代理人
主权项
地址
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